High-resolution electron imaging system

 Resolution:

• 15 nm @ 30 kV, 1 nA (LaB6)
• 20 nm (15 nm) @ 1 kV SE and W (LaB6)
• 10 nm @ 3 kV SE

 Accelerating Voltage: 0.2 kV to 30 kV

 Probe Current: 0.5 pA to 5 µA

 Magnification: < 5X to 1,000,000X

 Field of View: 6 mm at Analytical Working Distance (AWD)

 X-ray Geometry: 8.5 mm AWD and 35° take-off angle

 Pressure Range: 10 – 400 Pa (air / water vapour)

 Detectors Available:

• ETSE – Secondary Electron Detector
• BSD – Backscattered Electron Detector
• EDS – Energy Dispersive Spectrometer

 Chamber Dimensions: 365 mm (Ø) × 275 mm (h)

 Motorized multi-axis stage

 High vacuum and variable pressure operation

 Digital imaging and analysis software